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Journal: Crystals, 2023
Volume: 13
Number: 62
62
Article: Influence of Temperature and Flow Ratio on the Morphology and Uniformity of 4H-SiC Epitaxial Layers Growth on 150 mm 4° Off-Axis Substrates
Authors: by Zhuorui Tang, Lin Gu, Hongping Ma, Chaobin Mao, Sanzhong Wu, Nan Zhang, Jiyu Huang and Jiajie Fan
Link: https://www.mdpi.com/2073-4352/13/1/62

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