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Journal: Crystals, 2022
Volume: 12
Number: 722
722
Article: The Atomic Layer Etching Technique with Surface Treatment Function for InAlN/GaN Heterostructure
Authors: by Fangzhou Du, Yang Jiang, Zhanxia Wu, Honghao Lu, Jiaqi He, Chuying Tang, Qiaoyu Hu, Kangyao Wen, Xinyi Tang, Haimin Hong, Hongyu Yu and Qing Wang
Link: https://www.mdpi.com/2073-4352/12/5/722

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