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Volume 16
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10.3390/mi16050600
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Communication

Bulk Acoustic Wave Resonance Characteristics of PMN-PT Orthorhombic Crystal Plates Excited by Lateral Electric Fields

by
Boyue Su
1,†,
Yujie Zhang
1,†,
Feng Yu
2,
Pengfei Kang
1,
Tingfeng Ma
1,*,
Peng Li
3,
Zhenghua Qian
3,
Iren Kuznetsova
4 and
Vladimir Kolesov
4
1
Zhejiang-Italy Joint Lab for Smart Materials and Advanced Structures, School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, China
2
Ningbo Liance Smart Technology Co., Ltd., Ningbo 315211, China
3
The State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
4
Kotelnikov Institute of Radio Engineering and Electronics of RAS, Moscow 125009, Russia
*
Author to whom correspondence should be addressed.
†
These authors contributed equally to this work.
Micromachines 2025, 16(5), 600; https://doi.org/10.3390/mi16050600
Submission received: 18 April 2025 / Revised: 12 May 2025 / Accepted: 15 May 2025 / Published: 21 May 2025
(This article belongs to the Special Issue Surface and Bulk Acoustic Wave Devices)
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Abstract

For relaxor ferroelectric single crystal (1 − x)Pb(Mg1/3Nb2/3)O3 − xPbTiO3 (PMN-PT), through reasonable component regulation and electric field polarization, an orthogonal mm2 point group structure can be obtained, which has high piezoelectric constants and is, therefore, a desired substrate material for lateral-field-excited (LFE) bulk acoustic wave (BAW) devices. In this work, acoustic wave resonance characteristics of (zxt) 45° PMN-PT BAW devices with LFE are investigated. Firstly, Mindlin first-order plate theory is used to obtain vibration governing equations of orthorhombic crystals excited by a lateral electric field. By analyzing the electrically forced vibrations of the finite plate, the basic vibration characteristics, such as motional capacitance, resonant frequency, and mode shape are obtained, and influences of different electrode parameters on resonance characteristics of the device are investigated. In addition, the effects of the structure parameters on the mass sensitivity of the devices are analyzed and further verified by FEM simulations. The model presented in this study can be conveniently used to optimize the structural parameters of LFE bulk acoustic wave devices based on orthorhombic crystals, which is crucial to obtain good resonance characteristics. The results provide an important basis for the design of LFE bulk acoustic wave resonators and sensors by using PMN-PT orthorhombic crystals.
Keywords: PMN-PT relaxor ferroelectric single crystal; lateral field excitation; high frequency resonance; bulk acoustic wave sensor PMN-PT relaxor ferroelectric single crystal; lateral field excitation; high frequency resonance; bulk acoustic wave sensor

Share and Cite

MDPI and ACS Style

Su, B.; Zhang, Y.; Yu, F.; Kang, P.; Ma, T.; Li, P.; Qian, Z.; Kuznetsova, I.; Kolesov, V. Bulk Acoustic Wave Resonance Characteristics of PMN-PT Orthorhombic Crystal Plates Excited by Lateral Electric Fields. Micromachines 2025, 16, 600. https://doi.org/10.3390/mi16050600

AMA Style

Su B, Zhang Y, Yu F, Kang P, Ma T, Li P, Qian Z, Kuznetsova I, Kolesov V. Bulk Acoustic Wave Resonance Characteristics of PMN-PT Orthorhombic Crystal Plates Excited by Lateral Electric Fields. Micromachines. 2025; 16(5):600. https://doi.org/10.3390/mi16050600

Chicago/Turabian Style

Su, Boyue, Yujie Zhang, Feng Yu, Pengfei Kang, Tingfeng Ma, Peng Li, Zhenghua Qian, Iren Kuznetsova, and Vladimir Kolesov. 2025. "Bulk Acoustic Wave Resonance Characteristics of PMN-PT Orthorhombic Crystal Plates Excited by Lateral Electric Fields" Micromachines 16, no. 5: 600. https://doi.org/10.3390/mi16050600

APA Style

Su, B., Zhang, Y., Yu, F., Kang, P., Ma, T., Li, P., Qian, Z., Kuznetsova, I., & Kolesov, V. (2025). Bulk Acoustic Wave Resonance Characteristics of PMN-PT Orthorhombic Crystal Plates Excited by Lateral Electric Fields. Micromachines, 16(5), 600. https://doi.org/10.3390/mi16050600

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