Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer
Abstract
:1. Introduction
2. Materials and Methods
2.1. Sputter Deposition of Lead Zirconate Titanate (PZT) Fibered-Epitaxial Thin Film
2.2. Fabrication of pMUT Linear Array with Partially-Etched PZT Thin Film
3. Results and Discussion
3.1. Characterization of PZT Fibered-Epitaxial Thin Film on Si
3.2. Actuation Performance and Mechanical Toughness of pMUT Based on PZT Fibered-Epitaxial Thin Film
3.2.1. pMUT Using Partially-Etched Structure
3.2.2. Characterization of the PZT Fibered-Epitaxial Thin Film via the Actuation Experiments of the Fabricated pMUT
4. Conclusions
Author Contributions
Acknowledgments
Conflicts of Interest
References
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Material | Young Modulus E (GPa) | Residual Stress σ (MPa) | Poisson’s Ratio | Initial Strain () | Thickness (µm) |
---|---|---|---|---|---|
SiO2 | 73.1 | −300 | 0.17 | −0.0040 | 1.0 |
Si-device layer | 180 | - | 0.3 | 0 | 2.5 |
PZT | 76 | +200 | 0.3 | +0.0026 | 1.7 |
Mechanical Properties | PZT-5A | Si |
---|---|---|
Stiffness coefficient (GPa) | ||
c11 | 121 | 165.7 |
c12 | 75.4 | 63.9 |
c13 | 75.2 | 63.9 |
c33 | 111 | 165.7 |
c44 | 21.1 | 79.6 |
Piezoelectric coefficient (C/m2) | ||
e31 | −5.4 | - |
e33 | 15.8 | - |
e15 | 12.3 | - |
Relative permittivity | ||
εr11 | 915 | 11.8 |
εr33 | 829 | 11.8 |
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Ngoc Thao, P.; Yoshida, S.; Tanaka, S. Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer. Micromachines 2018, 9, 455. https://doi.org/10.3390/mi9090455
Ngoc Thao P, Yoshida S, Tanaka S. Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer. Micromachines. 2018; 9(9):455. https://doi.org/10.3390/mi9090455
Chicago/Turabian StyleNgoc Thao, Pham, Shinya Yoshida, and Shuji Tanaka. 2018. "Fabrication and Characterization of PZT Fibered-Epitaxial Thin Film on Si for Piezoelectric Micromachined Ultrasound Transducer" Micromachines 9, no. 9: 455. https://doi.org/10.3390/mi9090455