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Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating

1,2,3,*, 1,4,*, 1,5, 1,5, 1,3 and 1,3
Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China
College of Information Engineering, Qujing Normal University, Qujing 655000, China
Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Fraunhofer Institute for Electronic Nano Systems (ENAS), 09131 Chemnitz, Germany
College of Electronic and Information Engineering, Southwest University, Chongqing 400715, China
Authors to whom correspondence should be addressed.
Micromachines 2018, 9(10), 478;
Received: 15 August 2018 / Revised: 15 September 2018 / Accepted: 18 September 2018 / Published: 20 September 2018
(This article belongs to the Special Issue MEMS/NEMS Sensors: Fabrication and Application)
PDF [6613 KB, uploaded 20 September 2018]


This paper presents a dispersive near-infrared spectrometer with features of miniaturization, portability and low cost. The application of a resonantly-driven scanning grating mirror (SGM) as a dispersive element in a crossed Czerny–Turner configuration enables the design of a miniaturized spectrometer that can detect the full spectra using only one single InGaAs diode. In addition, a high accuracy recalculation is realized, which can convert time-dependent measurements to spectrum information by utilizing the deflection position detector integrated on SGM and its associated closed-loop control circuit. Finally, the spectrometer prototype is subjected to a series of tests to characterize the instrument’s performance fully. The results of the experiment show that the spectrometer works in a spectral range of 800 nm–1800 nm with a resolution of less than 10 nm, a size of 9 × 7 × 7 cm3, a wavelength stability better than ±1 nm and a measuring time of less than 1 ms. Furthermore, the power consumption of the instrument is 3 W at 5 V DC, and the signal-to-noise ratio is 3267 at full scale. Therefore, this spectrometer could be a potential alternative to classical spectrometers in process control applications or could be used as a portable or airborne spectroscopic sensor. View Full-Text
Keywords: micro-NIR spectrometer; scanning grating mirror; deflection position detector micro-NIR spectrometer; scanning grating mirror; deflection position detector

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Huang, J.; Wen, Q.; Nie, Q.; Chang, F.; Zhou, Y.; Wen, Z. Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating. Micromachines 2018, 9, 478.

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