Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating
AbstractThis paper presents a dispersive near-infrared spectrometer with features of miniaturization, portability and low cost. The application of a resonantly-driven scanning grating mirror (SGM) as a dispersive element in a crossed Czerny–Turner configuration enables the design of a miniaturized spectrometer that can detect the full spectra using only one single InGaAs diode. In addition, a high accuracy recalculation is realized, which can convert time-dependent measurements to spectrum information by utilizing the deflection position detector integrated on SGM and its associated closed-loop control circuit. Finally, the spectrometer prototype is subjected to a series of tests to characterize the instrument’s performance fully. The results of the experiment show that the spectrometer works in a spectral range of 800 nm–1800 nm with a resolution of less than 10 nm, a size of 9 × 7 × 7 cm3, a wavelength stability better than ±1 nm and a measuring time of less than 1 ms. Furthermore, the power consumption of the instrument is 3 W at 5 V DC, and the signal-to-noise ratio is 3267 at full scale. Therefore, this spectrometer could be a potential alternative to classical spectrometers in process control applications or could be used as a portable or airborne spectroscopic sensor. View Full-Text
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Huang, J.; Wen, Q.; Nie, Q.; Chang, F.; Zhou, Y.; Wen, Z. Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating. Micromachines 2018, 9, 478.
Huang J, Wen Q, Nie Q, Chang F, Zhou Y, Wen Z. Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating. Micromachines. 2018; 9(10):478.Chicago/Turabian Style
Huang, Jian; Wen, Quan; Nie, Qiuyu; Chang, Fei; Zhou, Ying; Wen, Zhiyu. 2018. "Miniaturized NIR Spectrometer Based on Novel MOEMS Scanning Tilted Grating." Micromachines 9, no. 10: 478.
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