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Open AccessFeature PaperArticle

Fluorosilicone as an Omnimold for Microreplication

Department of Mechanical Engineering, University of Alberta, Edmonton, AB T6G 2G8, Canada
National Key Laboratory of Aerospace Flight Dynamics, Northwestern Polytechnical University, Xi’an 710072, China
Author to whom correspondence should be addressed.
Micromachines 2018, 9(8), 406;
Received: 19 July 2018 / Revised: 8 August 2018 / Accepted: 10 August 2018 / Published: 16 August 2018
(This article belongs to the Special Issue Polymer Based MEMS and Microfabrication)
PDF [2498 KB, uploaded 16 August 2018]


Soft lithography and replica molding have been an integral part of polymer basic microfabrication for over 20 years. The use of silicone rubber materials as either molds or directly molded parts are well described in the literature and have provided researchers with an easily accessible technique to reproduce complex micro and nanostructures with minimal costs and technical challenges. Yet, for many applications, the use of standard silicones may not necessarily be the best choice, either as a mold material or as a replicated surface. For those instances where a mold is required that is high temperature tolerant, flexible, durable and capable of being used as a mold for multiple materials including silicone rubber, the most commonly used silicone rubber, Sylgard-184, has substantial deficiencies. In this work, we introduce a new material, Fluorosilicone that has not been described in the microfabrication field in detail and determine it is capable of reproducing micro structures via soft lithography techniques and being used as a mold for thermoplastic and thermosetting polymers, including silicone rubbers. Material compatibility, appropriate processing conditions for quality replicas and demonstration of extremely fast production of silicone microstructures are reported. View Full-Text
Keywords: fluorosilicone; soft lithography; molding; adhesion; silicone; polyurethane; casting fluorosilicone; soft lithography; molding; adhesion; silicone; polyurethane; casting

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Zhang, T.; Yue, X.; Sameoto, D. Fluorosilicone as an Omnimold for Microreplication. Micromachines 2018, 9, 406.

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