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Journal: Micromachines, 2018
Volume: 9
Number: 401
Article:
Array of Resonant Electromechanical Nanosystems: A Technological Breakthrough for Uncooled Infrared Imaging
Authors:
by
Laurent Duraffourg, Ludovic Laurent, Jean-Sébastien Moulet, Julien Arcamone and Jean-Jacques Yon
Link:
https://www.mdpi.com/2072-666X/9/8/401
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