A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters
1
Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Kemivagen 9, 41258 Gothenburg, Sweden
2
Ri.Se Acreo AB, Arvid Hedvalls Backe 4, 41133 Gothenburg, Sweden
3
MyVox AB, Isafjordsgatan 22 (c/o Ri.SE), SE-164 40 Kista, Sweden
4
Silex Microsystems AB, Bruttovagen 1, 175 43 Jarfalla, Sweden
*
Author to whom correspondence should be addressed.
†
These authors contributed equally to this work.
Micromachines 2018, 9(5), 252; https://doi.org/10.3390/mi9050252
Received: 8 April 2018
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Revised: 16 May 2018
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Accepted: 18 May 2018
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Published: 21 May 2018
(This article belongs to the Special Issue Microsystems for Power, Energy, and Actuation)
This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things.
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Keywords:
piezoelectric micro-energy harvester; lead zirconate titanate; bandwidth broadening; coupled cantilevers; enhanced stress distribution; finite element modeling; microelectromechanical systems (MEMS)
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MDPI and ACS Style
Vyas, A.; Staaf, H.; Rusu, C.; Ebefors, T.; Liljeholm, J.; Smith, A.D.; Lundgren, P.; Enoksson, P. A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters. Micromachines 2018, 9, 252. https://doi.org/10.3390/mi9050252
AMA Style
Vyas A, Staaf H, Rusu C, Ebefors T, Liljeholm J, Smith AD, Lundgren P, Enoksson P. A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters. Micromachines. 2018; 9(5):252. https://doi.org/10.3390/mi9050252
Chicago/Turabian StyleVyas, Agin, Henrik Staaf, Cristina Rusu, Thorbjörn Ebefors, Jessica Liljeholm, Anderson D. Smith, Per Lundgren, and Peter Enoksson. 2018. "A Micromachined Coupled-Cantilever for Piezoelectric Energy Harvesters" Micromachines 9, no. 5: 252. https://doi.org/10.3390/mi9050252
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