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FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor

1,2,*, 1,2,3,*, 1,2, 1,2 and 1,2
Microsystem Research Center, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China
Fraunhofer Institute for Electronic Nano Systems (ENAS), 09131 Chemnitz, Germany
Authors to whom correspondence should be addressed.
Micromachines 2018, 9(5), 214;
Received: 30 March 2018 / Revised: 21 April 2018 / Accepted: 26 April 2018 / Published: 2 May 2018
(This article belongs to the Special Issue Optical MEMS)
PDF [13040 KB, uploaded 2 May 2018]


This paper presents a flame retardant 4 (FR4)-based electromagnetic scanning micromirror, which aims to overcome the limitations of conventional microelectromechanical systems (MEMS) micromirrors for the large-aperture and low-frequency scanning applications. This micromirror is fabricated through a commercial printed circuit board (PCB) technology at a low cost and with a short process cycle, before an aluminum-coated silicon mirror plate with a large aperture is bonded on the FR4 platform to provide a high surface quality. In particular, an electromagnetic angle sensor is integrated to monitor the motion of the micromirror in real time. A prototype has been assembled and tested. The results show that the micromirror can reach the optical scan angle of 11.2 with a low driving voltage of only 425 mV at resonance (361.8 Hz). At the same time, the signal of the integrated angle sensor also shows good signal-to-noise ratio, linearity and sensitivity. Finally, the reliability of the FR4 based micro-mirror has been tested. The prototype successfully passes both shock and vibration tests. Furthermore, the results of the long-term mechanical cycling test (50 million cycles) suggest that the maximum variations of resonant frequency and scan angle are less than 0.3% and 6%, respectively. Therefore, this simple and robust micromirror has great potential in being useful in a number of optical microsystems, especially when large-aperture or low-frequency is required. View Full-Text
Keywords: scanning micromirror; electromagnetic actuator; angle sensor; flame retardant 4 (FR4) scanning micromirror; electromagnetic actuator; angle sensor; flame retardant 4 (FR4)

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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MDPI and ACS Style

Lei, H.; Wen, Q.; Yu, F.; Zhou, Y.; Wen, Z. FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor. Micromachines 2018, 9, 214.

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