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Micromachines 2018, 9(12), 632; https://doi.org/10.3390/mi9120632

A MEMS Variable Optical Attenuator with Ultra-Low Wavelength-Dependent Loss and Polarization-Dependent Loss

1
School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China
2
AOFSS (Shenzhen) Co., Ltd., Shenzhen 518103, China
3
Shenzhen Huazhong University of Science and Technology Research Institute, Shenzhen 518000, China
*
Author to whom correspondence should be addressed.
Received: 16 October 2018 / Revised: 26 November 2018 / Accepted: 27 November 2018 / Published: 29 November 2018
(This article belongs to the Special Issue Optical MEMS)
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Abstract

Applications in broadband optical fiber communication system need variable optical attenuators (VOAs) with low wavelength-dependent loss (WDL). Based on analysis on the dispersion of the optical system of a MEMS-based VOA, we provide a method to reduce the WDL significantly with minor revision on the end-face angle of the collimating lens. Two samples are assembled, and the measured WDL is <0.4 dB over the C-band (1.53–1.57 μm) at a 0–20 dB attenuation range. Meanwhile, the new structure helps to reduce the polarization-dependent loss (PDL) to <0.15 dB, which is only half that of conventional devices. View Full-Text
Keywords: variable optical attenuator (VOA); wavelength dependent loss (WDL); polarization dependent loss (PDL); micro-electro-mechanical systems (MEMS) variable optical attenuator (VOA); wavelength dependent loss (WDL); polarization dependent loss (PDL); micro-electro-mechanical systems (MEMS)
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Sun, H.; Zhou, W.; Zhang, Z.; Wan, Z. A MEMS Variable Optical Attenuator with Ultra-Low Wavelength-Dependent Loss and Polarization-Dependent Loss. Micromachines 2018, 9, 632.

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