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Journal: Micromachines, 2018
Volume: 9
Number: 190

Article: Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Authors: by Sebastian Uhlig, Matthieu Gaudet, Sergiu Langa, Klaus Schimmanz, Holger Conrad, Bert Kaiser and Harald Schenk
Link: https://www.mdpi.com/2072-666X/9/4/190

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