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Journal: Micromachines, 2018
Volume: 9
Number: 190
Article:
Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration
Authors:
by
Sebastian Uhlig, Matthieu Gaudet, Sergiu Langa, Klaus Schimmanz, Holger Conrad, Bert Kaiser and Harald Schenk
Link:
https://www.mdpi.com/2072-666X/9/4/190
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