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Micromachines 2018, 9(4), 148;

Advanced Fabrication of Single-Crystal Diamond Membranes for Quantum Technologies

Fachrichtung Physik, Universität des Saarlandes, 66123 Saarbrücken, Germany
Department of Physics, University of Basel, Klingelbergstrasse 82, CH-4056 Basel, Switzerland
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Received: 20 February 2018 / Revised: 21 March 2018 / Accepted: 22 March 2018 / Published: 25 March 2018
(This article belongs to the Special Issue Color Centers in Diamond: Fabrication, Devices and Applications)
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Many promising applications of single crystal diamond and its color centers as sensor platform and in photonics require free-standing membranes with a thickness ranging from several micrometers to the few 100 nm range. In this work, we present an approach to conveniently fabricate such thin membranes with up to about one millimeter in size. We use commercially available diamond plates (thickness 50 μ m) in an inductively coupled reactive ion etching process which is based on argon, oxygen and SF 6 . We thus avoid using toxic, corrosive feed gases and add an alternative to previously presented recipes involving chlorine-based etching steps. Our membranes are smooth (RMS roughness <1 nm) and show moderate thickness variation (central part: <1 μ m over ≈200 × 200 μ m 2 ). Due to an improved etch mask geometry, our membranes stay reliably attached to the diamond plate in our chlorine-based as well as SF 6 -based processes. Our results thus open the route towards higher reliability in diamond device fabrication and up-scaling. View Full-Text
Keywords: diamond; color centers; nanofabrication; quantum sensing; diamond photonics diamond; color centers; nanofabrication; quantum sensing; diamond photonics

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Challier, M.; Sonusen, S.; Barfuss, A.; Rohner, D.; Riedel, D.; Koelbl, J.; Ganzhorn, M.; Appel, P.; Maletinsky, P.; Neu, E. Advanced Fabrication of Single-Crystal Diamond Membranes for Quantum Technologies. Micromachines 2018, 9, 148.

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