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Micromachines 2018, 9(4), 147; https://doi.org/10.3390/mi9040147

A DLC-Punch Array to Fabricate the Micro-Textured Aluminum Sheet for Boiling Heat Transfer Control

1
Department of Materials Science and Engineering, Shibaura Institute of Technology, 3-9-14 Shibaura, Minato-City, Tokyo 108-8548, Japan
2
TECDIA, Co., Ltd., 4-3-4 Shibaura, Minato-City, Tokyo 108-0023, Japan
3
NIRO, Co., Ltd., 6-1 Minatojima-Nakamachi, Chuo-Ward, Kobe 650-0043, Japan
*
Author to whom correspondence should be addressed.
Received: 31 December 2017 / Revised: 21 March 2018 / Accepted: 23 March 2018 / Published: 25 March 2018
(This article belongs to the Special Issue Carbon Based Materials for MEMS/NEMS)
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Abstract

A diamond-like carbon (DLC) film, coated on an SKD11 (alloy tool steel) substrate, was shaped by plasma oxidation to form an assembly of DLC macro-pillars and to be used as a DLC-punch array that is micro-embossed into aluminum sheets. First, the SKD11 steel die substrate was prepared and DLC-coated to have a film thickness of 10 μm. This DLC coating worked as a punch material. The two-dimensional micro-patterns were printed onto this DLC film by maskless lithography. The unprinted DLC films were selectively removed by plasma oxidation to leave the three-dimensional DLC-punch array on the SKD11 substrate. Each DLC punch had a head of 3.5 μm × 3.5 μm and a height of 8 μm. This DLC-punch array was fixed into the cassette die set for a micro-embossing process using a table-top servo-stamper. Furthermore, through numerically controlled micro-embossing, an alignment of rectangular punches was transcribed into a micro-cavity array in the aluminum sheet. The single micro-cavity had a bottom surface of 3.2 μm × 3.2 μm and an average depth of 7.5 μm. A heat-transfer experiment in boiling water was also performed to investigate the effect of micro-cavity texture on bubbling behavior and the boiling curve. View Full-Text
Keywords: plasma printing; multi DLC-punch assembly; plasma oxidation; micro-cavity textures; micro-embossing; aluminum sheets; boiling heat transfer plasma printing; multi DLC-punch assembly; plasma oxidation; micro-cavity textures; micro-embossing; aluminum sheets; boiling heat transfer
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Aizawa, T.; Wasa, K.; Tamagaki, H. A DLC-Punch Array to Fabricate the Micro-Textured Aluminum Sheet for Boiling Heat Transfer Control. Micromachines 2018, 9, 147.

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