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Journal: Micromachines, 2018
Volume: 9
Number: 120
120
Article: Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers
Authors: by Huan Liu, Runiu Fang, Min Miao, Yichuan Zhang, Yingzhan Yan, Xiaoping Tang, Huixiang Lu and Yufeng Jin
Link: https://www.mdpi.com/2072-666X/9/3/120

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