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Journal: Micromachines, 2018
Volume: 9
Number: 557
Article:
Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach
Authors:
by
Haotian Liu, Li Zhang, King Ho Holden Li and Ooi Kiang Tan
Link:
https://www.mdpi.com/2072-666X/9/11/557
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