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Micromachines 2017, 8(7), 215;

PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning

Micro System Technology, Fraunhofer Institute for Silicon Technology, Itzehoe 25524, Germany
Author to whom correspondence should be addressed.
Received: 9 April 2017 / Revised: 30 June 2017 / Accepted: 2 July 2017 / Published: 6 July 2017
(This article belongs to the Special Issue MEMS Mirrors)
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This article presents design, fabrication and characterization of lead zirconate titanate (PZT)-actuated micromirrors, which enable extremely large scan angle of up to 106° and high frequency of 45 kHz simultaneously. Besides the high driving torque delivered by PZT actuators, mechanical leverage amplification has been applied for the micromirrors in this work to reach large displacements consuming low power. Additionally, fracture strength and failure behavior of poly-Si, which is the basic material of the micromirrors, have been studied to optimize the designs and prevent the device from breaking due to high mechanical stress. Since comparing to using biaxial micromirror, realization of biaxial scanning using two independent single-axial micromirrors shows considerable advantages, a setup combining two single-axial micromirrors for biaxial scanning and the results will also be presented in this work. Moreover, integrated piezoelectric position sensors are implemented within the micromirrors, based on which closed-loop control has been developed and studied. View Full-Text
Keywords: micromirror; PZT; piezoelectric; position sensors; biaxial scanning micromirror; PZT; piezoelectric; position sensors; biaxial scanning

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Gu-Stoppel, S.; Giese, T.; Quenzer, H.-J.; Hofmann, U.; Benecke, W. PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning. Micromachines 2017, 8, 215.

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