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Journal: Micromachines, 2017
Volume: 8
Number: 215
Article:
PZT-Actuated and -Sensed Resonant Micromirrors with Large Scan Angles Applying Mechanical Leverage Amplification for Biaxial Scanning
Authors:
by
Shanshan Gu-Stoppel, Thorsten Giese, Hans-Joachim Quenzer, Ulrich Hofmann and Wolfgang Benecke
Link:
https://www.mdpi.com/2072-666X/8/7/215
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