Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption
Lara-Castro, M.; Herrera-Amaya, A.; Escarola-Rosas, M.A.; Vázquez-Toledo, M.; López-Huerta, F.; Aguilera-Cortés, L.A.; Herrera-May, A.L. Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption. Micromachines 2017, 8, 203. https://doi.org/10.3390/mi8070203
Lara-Castro M, Herrera-Amaya A, Escarola-Rosas MA, Vázquez-Toledo M, López-Huerta F, Aguilera-Cortés LA, Herrera-May AL. Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption. Micromachines. 2017; 8(7):203. https://doi.org/10.3390/mi8070203
Chicago/Turabian StyleLara-Castro, Miguel; Herrera-Amaya, Adrian; Escarola-Rosas, Marco A.; Vázquez-Toledo, Moisés; López-Huerta, Francisco; Aguilera-Cortés, Luz A.; Herrera-May, Agustín L. 2017. "Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption" Micromachines 8, no. 7: 203. https://doi.org/10.3390/mi8070203