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Micromachines 2017, 8(4), 126;

The Exploration for an Appropriate Vacuum Level for Performance Enhancement of a Comb-Drive Microscanner

Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi’an 710072, China
Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi’an 710072, China
Xi’an Zhisensor Technologies Co. Ltd., Xi’an 710077, China
LeadMEMS Science and Technology Ltd., Xi’an 710075, China
Author to whom correspondence should be addressed.
Academic Editors: Kazunori Hoshino and Huikai Xie
Received: 17 February 2017 / Revised: 7 April 2017 / Accepted: 11 April 2017 / Published: 16 April 2017
(This article belongs to the Special Issue MEMS Mirrors)
Full-Text   |   PDF [10567 KB, uploaded 17 April 2017]   |  


In order to identify the influence of the vacuum environment on the performance of a comb-drive microscanner, and indicate the optimum pressure for enhancing its performance, a comb-drive microscanner fabricated on silicon-on-insulator (SOI) substrate was prepared and tested at different pressures, and the characteristics in vacuum were obtained. The test results revealed that the vacuum environment enhanced the performance in the optical scanning angle, and decreased the actuation voltage. With a 30 V driving voltage applied, the microscanner can reach an optical scanning angle of 44.3° at a pressure of 500 Pa. To obtain an enhancement in its properties, only a vacuum range from 100 to 1000 Pa is needed, which can be very readily and economically realized and maintained in a vacuum package. View Full-Text
Keywords: microscanner; optical scanning angle; vacuum operation; optimum pressure microscanner; optical scanning angle; vacuum operation; optimum pressure

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Zhao, R.; Qiao, D.; Song, X.; You, Q. The Exploration for an Appropriate Vacuum Level for Performance Enhancement of a Comb-Drive Microscanner. Micromachines 2017, 8, 126.

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