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Journal: Micromachines, 2017
Volume: 8
Number: 126
Article:
The Exploration for an Appropriate Vacuum Level for Performance Enhancement of a Comb-Drive Microscanner
Authors:
by
Rong Zhao, Dayong Qiao, Xiumin Song and Qiaoming You
Link:
https://www.mdpi.com/2072-666X/8/4/126
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