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Micromachines 2016, 7(4), 69;

Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575
Author to whom correspondence should be addressed.
Academic Editors: Pei-Cheng Ku and Jaeyoun (Jay) Kim
Received: 29 February 2016 / Revised: 10 April 2016 / Accepted: 11 April 2016 / Published: 16 April 2016
(This article belongs to the Special Issue Micro/Nano Photonic Devices and Systems)
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This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed. View Full-Text
Keywords: MEMS; NEMS; photonics; plasmonics; metamaterials; optomechanics MEMS; NEMS; photonics; plasmonics; metamaterials; optomechanics

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Du, H.; Chau, F.S.; Zhou, G. Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators. Micromachines 2016, 7, 69.

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