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Journal: Micromachines, 2016
Volume: 7
Number: 69

Article: Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
Authors: by Han Du, Fook Siong Chau and Guangya Zhou
Link: https://www.mdpi.com/2072-666X/7/4/69

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