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Journal: Micromachines, 2016
Volume: 7
Number: 69
Article:
Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
Authors:
by
Han Du, Fook Siong Chau and Guangya Zhou
Link:
https://www.mdpi.com/2072-666X/7/4/69
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