Next Article in Journal
Baking Powder Actuated Centrifugo-Pneumatic Valving for Automation of Multi-Step Bioassays
Previous Article in Journal
A Simple Method for Fabrication of Microstructures Using a PDMS Stamp
Open AccessArticle

In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films

Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China
*
Author to whom correspondence should be addressed.
Academic Editor: Hiroshi Toshiyoshi
Micromachines 2016, 7(10), 174; https://doi.org/10.3390/mi7100174
Received: 27 July 2016 / Revised: 17 September 2016 / Accepted: 20 September 2016 / Published: 1 October 2016
This paper presents an intuitive yet effective in-situ thermal diffusivity testing structure and testing method. The structure consists of two doubly clamped beams with the same width and thickness but different lengths. When the electric current is applied through two terminals of one beam, the beam serves as thermal resistor and the resistance R(t) varies as temperature rises. A delicate thermodynamic model considering thermal convection, thermal radiation, and film-to-substrate heat conduction was established for the testing structure. The presented in-situ thermal diffusivity testing structure can be fabricated by various commonly used micro electro mechanical systems (MEMS) fabrication methods, i.e., it requires no extra customized processes yet provides electrical input and output interfaces for in-situ testing. Meanwhile, the testing environment and equipment had no stringent restriction, measurements were carried out at normal temperatures and pressures, and the results are relatively accurate. View Full-Text
Keywords: thermal diffusivity; process control monitoring (PCM); in-situ testing; thin film thermal diffusivity; process control monitoring (PCM); in-situ testing; thin film
Show Figures

Graphical abstract

MDPI and ACS Style

Gu, Y.-F.; Zhou, Z.-F.; Sun, C.; Li, W.-H.; Huang, Q.-A. In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films. Micromachines 2016, 7, 174.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop