Garofalo, A.; Muoio, A.; Belsito, L.; Sapienza, S.; Ferri, M.; Roncaglia, A.; La Via, F.
Heteroepitaxial 3C-SiC for MEMS Applications. Micromachines 2026, 17, 502.
https://doi.org/10.3390/mi17040502
AMA Style
Garofalo A, Muoio A, Belsito L, Sapienza S, Ferri M, Roncaglia A, La Via F.
Heteroepitaxial 3C-SiC for MEMS Applications. Micromachines. 2026; 17(4):502.
https://doi.org/10.3390/mi17040502
Chicago/Turabian Style
Garofalo, Angela, Annamaria Muoio, Luca Belsito, Sergio Sapienza, Matteo Ferri, Alberto Roncaglia, and Francesco La Via.
2026. "Heteroepitaxial 3C-SiC for MEMS Applications" Micromachines 17, no. 4: 502.
https://doi.org/10.3390/mi17040502
APA Style
Garofalo, A., Muoio, A., Belsito, L., Sapienza, S., Ferri, M., Roncaglia, A., & La Via, F.
(2026). Heteroepitaxial 3C-SiC for MEMS Applications. Micromachines, 17(4), 502.
https://doi.org/10.3390/mi17040502