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Journal: Micromachines, 2026
Volume: 17
Number: 345
345
Article: Piezoelectric Thin-Film Actuator for Dynamic Tuning of Micro-Optical Cavities
Authors: by Dehua Tan, Pengfei Li, Xuyang Zhou, Qingxiong Xiao, Chaohui Wu, Qixuan Zhu, Miao Lei, Ting Li and Qianbo Lu
Link: https://www.mdpi.com/2072-666X/17/3/345

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