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Journal: Micromachines, 2025
Volume: 16
Number: 999

Article: Recent Progress of Ion Implantation Technique in GaN-Based Electronic Devices
Authors: by Hao Lu, Xiaorun Hao, Yichi Zhang, Ling Yang, Bin Hou, Meng Zhang, Mei Wu, Xiaohua Ma and Yue Hao
Link: https://www.mdpi.com/2072-666X/16/9/999

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