Jiang, M.; Yao, M.; Song, G.; Zhou, Y.; Su, J.; Qi, Y.; Shi, J.
Investigation and Application of Key Alignment Parameters for Overlay Accuracy in 3D Structures. Micromachines 2025, 16, 876.
https://doi.org/10.3390/mi16080876
AMA Style
Jiang M, Yao M, Song G, Zhou Y, Su J, Qi Y, Shi J.
Investigation and Application of Key Alignment Parameters for Overlay Accuracy in 3D Structures. Micromachines. 2025; 16(8):876.
https://doi.org/10.3390/mi16080876
Chicago/Turabian Style
Jiang, Miao, Mingyi Yao, Ganlin Song, Yuxing Zhou, Jiani Su, Yuejing Qi, and Jiangliu Shi.
2025. "Investigation and Application of Key Alignment Parameters for Overlay Accuracy in 3D Structures" Micromachines 16, no. 8: 876.
https://doi.org/10.3390/mi16080876
APA Style
Jiang, M., Yao, M., Song, G., Zhou, Y., Su, J., Qi, Y., & Shi, J.
(2025). Investigation and Application of Key Alignment Parameters for Overlay Accuracy in 3D Structures. Micromachines, 16(8), 876.
https://doi.org/10.3390/mi16080876