Lin, M.; He, W.; Liu, J.; Li, F.; Luo, J.; Shen, Y.
An Improved YOLOv5 Model for Lithographic Hotspot Detection. Micromachines 2025, 16, 568.
https://doi.org/10.3390/mi16050568
AMA Style
Lin M, He W, Liu J, Li F, Luo J, Shen Y.
An Improved YOLOv5 Model for Lithographic Hotspot Detection. Micromachines. 2025; 16(5):568.
https://doi.org/10.3390/mi16050568
Chicago/Turabian Style
Lin, Mu, Wenjing He, Jiale Liu, Fencheng Li, Jun Luo, and Yijiang Shen.
2025. "An Improved YOLOv5 Model for Lithographic Hotspot Detection" Micromachines 16, no. 5: 568.
https://doi.org/10.3390/mi16050568
APA Style
Lin, M., He, W., Liu, J., Li, F., Luo, J., & Shen, Y.
(2025). An Improved YOLOv5 Model for Lithographic Hotspot Detection. Micromachines, 16(5), 568.
https://doi.org/10.3390/mi16050568