Article Versions Notes

Meng F, Zhang C, Zhang G, Wang R, He C, Yang Y, Cui J, Zhang W, Jia L. A Novel AlN/Sc_0.2Al_0.8N-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone. Micromachines. 2025; 16(4):454. https://doi.org/10.3390/mi16040454

Meng, Fansheng, Chaoshuai Zhang, Guojun Zhang, Renxin Wang, Changde He, Yuhua Yang, Jiangong Cui, Wendong Zhang, and Licheng Jia. 2025. "A Novel AlN/Sc_0.2Al_0.8N-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone" Micromachines 16, no. 4: 454. https://doi.org/10.3390/mi16040454

Meng, F., Zhang, C., Zhang, G., Wang, R., He, C., Yang, Y., Cui, J., Zhang, W., & Jia, L. (2025). A Novel AlN/Sc_0.2Al_0.8N-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS Hydrophone. Micromachines, 16(4), 454. https://doi.org/10.3390/mi16040454