He, K.; Feng, R.; Zheng, Y.; Guo, L.; Liao, Q.; Song, D.; Xiang, Y.; Li, X.
A Wafer-Level Fabricated Heating–Vacuum Micro-Platform with Resonant MEMS Monolithically Integrated. Micromachines 2025, 16, 214.
https://doi.org/10.3390/mi16020214
AMA Style
He K, Feng R, Zheng Y, Guo L, Liao Q, Song D, Xiang Y, Li X.
A Wafer-Level Fabricated Heating–Vacuum Micro-Platform with Resonant MEMS Monolithically Integrated. Micromachines. 2025; 16(2):214.
https://doi.org/10.3390/mi16020214
Chicago/Turabian Style
He, Kaixuan, Rui Feng, Yu Zheng, Lijian Guo, Qichao Liao, Dongfang Song, Yuan Xiang, and Xinxin Li.
2025. "A Wafer-Level Fabricated Heating–Vacuum Micro-Platform with Resonant MEMS Monolithically Integrated" Micromachines 16, no. 2: 214.
https://doi.org/10.3390/mi16020214
APA Style
He, K., Feng, R., Zheng, Y., Guo, L., Liao, Q., Song, D., Xiang, Y., & Li, X.
(2025). A Wafer-Level Fabricated Heating–Vacuum Micro-Platform with Resonant MEMS Monolithically Integrated. Micromachines, 16(2), 214.
https://doi.org/10.3390/mi16020214
