Author Biographies

Kaixuan He received his Master's degree in physical electronics from Peking University in 2011, and is now pursuing a PhD in Microelectronics and solid-state electronics at Fudan University. He worked as a researcher at East China Institute of Photo-Electron IC. His research topics mainly include MEMS process, MEMS devices, and resonant MEMS.
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Prof. Dr. Xinxin Li currently serves as a Professor and Deputy Director of the State Key Laboratory of Transducer Technology, National Laboratory of Microsystem Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences. He received a B.S. degree in semiconductor device and physics from Tsinghua University, Beijing, China, in 1987 and a Ph.D. degree in semiconductor physics and semiconductor device physics from Fudan University, Shanghai, China, in 1998. Prof. Dr. Xinxin Li was a Research Associate at the Hong Kong University of Science and Technology. He was a Research Fellow at Nanyang Technological University, Singapore. He joined Tohoku University, Japan, as a Lecturer (COE Fellowship). In addition, he was an Adjunct Professor at Fudan University, Shanghai Jiaotong University, Dalian University of Technology, Shanghai Tech University, and Suzhou University. From 2009 to 2013, he was a Consultant Professor for the World Class University Program of Korean at Chonnam National University, South Korea. He was the Director of the State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. He was granted the National Science Fund for Distinguished Young Scholars in 2007. Prof. Dr. Xinxin Li's research interests include micro-/nanosensors and MEMS/NEMS. He has invented about 100 patents and published more than 300 articles.
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