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Journal: Micromachines, 2025
Volume: 16
Number: 127
Article:
An Assessment of Local Geometric Uncertainties in Polysilicon MEMS: A Genetic Algorithm and POD-Kriging Surrogate Modeling Approach
Authors:
by
Ananya Roy, Francesco Rizzini, Gabriele Gattere, Carlo Valzasina, Aldo Ghisi and Stefano Mariani
Link:
https://www.mdpi.com/2072-666X/16/2/127
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