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Journal: Micromachines, 2025
Volume: 16
Number: 127

Article: An Assessment of Local Geometric Uncertainties in Polysilicon MEMS: A Genetic Algorithm and POD-Kriging Surrogate Modeling Approach
Authors: by Ananya Roy, Francesco Rizzini, Gabriele Gattere, Carlo Valzasina, Aldo Ghisi and Stefano Mariani
Link: https://www.mdpi.com/2072-666X/16/2/127

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