Mardani, S.; Jongebloed, B.; Hendriks, W.A.P.M.; Dijkstra, M.; Garcia-Blanco, S.M.
Fabrication Process Development for Optical Channel Waveguides in Sputtered Aluminum Nitride. Micromachines 2025, 16, 1259.
https://doi.org/10.3390/mi16111259
AMA Style
Mardani S, Jongebloed B, Hendriks WAPM, Dijkstra M, Garcia-Blanco SM.
Fabrication Process Development for Optical Channel Waveguides in Sputtered Aluminum Nitride. Micromachines. 2025; 16(11):1259.
https://doi.org/10.3390/mi16111259
Chicago/Turabian Style
Mardani, Soheila, Bjorn Jongebloed, Ward A. P. M. Hendriks, Meindert Dijkstra, and Sonia M. Garcia-Blanco.
2025. "Fabrication Process Development for Optical Channel Waveguides in Sputtered Aluminum Nitride" Micromachines 16, no. 11: 1259.
https://doi.org/10.3390/mi16111259
APA Style
Mardani, S., Jongebloed, B., Hendriks, W. A. P. M., Dijkstra, M., & Garcia-Blanco, S. M.
(2025). Fabrication Process Development for Optical Channel Waveguides in Sputtered Aluminum Nitride. Micromachines, 16(11), 1259.
https://doi.org/10.3390/mi16111259