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Journal: Micromachines, 2024
Volume: 15
Number: 807
Article:
Fabrication of Bulk Tungsten Microstructure Arrays for Hydrophobic Metallic Surfaces Using Inductively Coupled Plasma Deep Etching
Authors:
by
Zetian Wang, Yanming Xia, Lu Song, Jing Chen and Wei Wang
Link:
https://www.mdpi.com/2072-666X/15/6/807
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