Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design

Jia, Licheng; Liang, Yong; Meng, Fansheng; Zhang, Guojun; Wang, Renxin; He, Changde; Yang, Yuhua; Cui, Jiangong; Zhang, Wendong; Wu, Guoqiang

doi:10.3390/mi15060795

Open AccessArticle

Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design

by

Licheng Jia

^1,*

,

Yong Liang

¹,

Fansheng Meng

¹,

Guojun Zhang

¹,

Renxin Wang

¹,

Changde He

¹

,

Yuhua Yang

¹,

Jiangong Cui

¹,

Wendong Zhang

¹

and

Guoqiang Wu

²

¹

Key Laboratory of Instrumentation Science and Dynamic Measurement, North University of China, Taiyuan 030051, China

²

Hubei Key Laboratory of Electronic Manufacturing and Packaging Integration, Institute of Technological Sciences and the School of Microelectronics, Wuhan University, Wuhan 430072, China

^*

Author to whom correspondence should be addressed.

Micromachines 2024, 15(6), 795; https://doi.org/10.3390/mi15060795

Submission received: 20 April 2024 / Revised: 5 June 2024 / Accepted: 7 June 2024 / Published: 17 June 2024

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Abstract

This paper delves into enhancing the performance of ScAlN-based Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) through the implementation of Polydimethylsiloxane (PDMS) acoustic lenses. The PMUT, encapsulated in PDMS, underwent thorough characterization through the utilization of an industry-standard hydrophone calibration instrument. The experimental results showed that the ScAlN-based PMUT with the PDMS lenses achieved an impressive sensitivity of −160 dB (re: 1 V/μPa), an improvement of more than 8 dB compared to the PMUT with an equivalent PDMS film. There was a noticeable improvement in the −3 dB main lobe width within the frequency response when comparing the PMUT with PDMS encapsulation, both with and without lenses. The successful fabrication of high-performance PDMS lenses proved instrumental in significantly boosting the sensitivity of the PMUT. Comprehensive performance evaluations underscored that the designed PMUT in this investigation surpassed its counterparts reported in the literature and commercially available transducers. This encouraging outcome emphasizes its substantial potential for commercial applications.

Keywords: PMUT array; PDMS; acoustic lenses; sensitivity

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MDPI and ACS Style

Jia, L.; Liang, Y.; Meng, F.; Zhang, G.; Wang, R.; He, C.; Yang, Y.; Cui, J.; Zhang, W.; Wu, G. Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design. Micromachines 2024, 15, 795. https://doi.org/10.3390/mi15060795

AMA Style

Jia L, Liang Y, Meng F, Zhang G, Wang R, He C, Yang Y, Cui J, Zhang W, Wu G. Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design. Micromachines. 2024; 15(6):795. https://doi.org/10.3390/mi15060795

Chicago/Turabian Style

Jia, Licheng, Yong Liang, Fansheng Meng, Guojun Zhang, Renxin Wang, Changde He, Yuhua Yang, Jiangong Cui, Wendong Zhang, and Guoqiang Wu. 2024. "Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design" Micromachines 15, no. 6: 795. https://doi.org/10.3390/mi15060795

APA Style

Jia, L., Liang, Y., Meng, F., Zhang, G., Wang, R., He, C., Yang, Y., Cui, J., Zhang, W., & Wu, G. (2024). Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design. Micromachines, 15(6), 795. https://doi.org/10.3390/mi15060795

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Performance-Enhanced Piezoelectric Micromachined Ultrasonic Transducers by PDMS Acoustic Lens Design

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