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Journal: Micromachines, 2024
Volume: 15
Number: 257
Article:
Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields
Authors:
by
Stella Lulinsky, Ben Torteman, Bojan R. Ilic and Slava Krylov
Link:
https://www.mdpi.com/2072-666X/15/2/257
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