Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings

Chen, Wenqing; Jin, Li; Wang, Zhibin; Peng, Haifeng; Li, Mengwei

doi:10.3390/mi14071301

Open AccessCommunication

Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings

by

Wenqing Chen

^1,2,

Li Jin

^1,2,*,

Zhibin Wang

^1,2,

Haifeng Peng

^1,2 and

Mengwei Li

^1,2,*

¹

School of Instrument and Electronics, North University of China, Taiyuan 030051, China

²

Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China

^*

Authors to whom correspondence should be addressed.

Micromachines 2023, 14(7), 1301; https://doi.org/10.3390/mi14071301

Submission received: 8 May 2023 / Revised: 19 June 2023 / Accepted: 23 June 2023 / Published: 25 June 2023

(This article belongs to the Special Issue Accelerometer and Magnetometer: From Fundamentals to Applications)

Download

Browse Figures

Review Reports Versions Notes

Abstract

An ultrasensitive single-axis in-plane micro-optical-electro-mechanical-system (MOEMS) accelerometer based on the Talbot effect of dual-layer gratings is proposed. Based on the Talbot effect of gratings, the acceleration can be converted into the variation of diffraction intensity, thus changing the voltage signal of photodetectors. We investigated and optimized the design of the mechanical structure; the resonant frequency of the accelerometer is 1878.9 Hz and the mechanical sensitivity is 0.14 μm/g. And the optical grating parameters have also optimized with a period of 4 μm and a grating interval of 10 μm. The experimental results demonstrated that the in-plane MOEMS accelerometer with an optimal design achieved an acceleration sensitivity of 0.74 V/g (with better than 0.4% nonlinearity), a bias stability of 75 μg and an acceleration resolution of 2.0 mg, suggesting its potential applications in smartphones, automotive electronics, and structural health detection.

Keywords: optical micro-grating; Talbot effect; optical interference; micro-accelerometer

Share and Cite

MDPI and ACS Style

Chen, W.; Jin, L.; Wang, Z.; Peng, H.; Li, M. Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings. Micromachines 2023, 14, 1301. https://doi.org/10.3390/mi14071301

AMA Style

Chen W, Jin L, Wang Z, Peng H, Li M. Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings. Micromachines. 2023; 14(7):1301. https://doi.org/10.3390/mi14071301

Chicago/Turabian Style

Chen, Wenqing, Li Jin, Zhibin Wang, Haifeng Peng, and Mengwei Li. 2023. "Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings" Micromachines 14, no. 7: 1301. https://doi.org/10.3390/mi14071301

APA Style

Chen, W., Jin, L., Wang, Z., Peng, H., & Li, M. (2023). Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings. Micromachines, 14(7), 1301. https://doi.org/10.3390/mi14071301

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

Article Menu

Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings

Abstract

Share and Cite

Article Metrics

Article Access Statistics

Further Information

Guidelines

MDPI Initiatives

Follow MDPI