Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers
Abstract
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Tan, H.; Pan, D.; Wang, C.; Yao, Y. Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers. Micromachines 2023, 14, 1870. https://doi.org/10.3390/mi14101870
Tan H, Pan D, Wang C, Yao Y. Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers. Micromachines. 2023; 14(10):1870. https://doi.org/10.3390/mi14101870
Chicago/Turabian StyleTan, Hongyu, Debin Pan, Chensheng Wang, and Yuan Yao. 2023. "Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers" Micromachines 14, no. 10: 1870. https://doi.org/10.3390/mi14101870
APA StyleTan, H., Pan, D., Wang, C., & Yao, Y. (2023). Silicon-Based Zipper Photonic Crystal Cavity Optomechanical System for Accelerometers. Micromachines, 14(10), 1870. https://doi.org/10.3390/mi14101870
