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Journal: Micromachines, 2023
Volume: 14
Number: 1301

Article: Design and Demonstration of an In-Plane Micro-Optical-Electro-Mechanical-System Accelerometer Based on Talbot Effect of Dual-Layer Gratings
Authors: by Wenqing Chen, Li Jin, Zhibin Wang, Haifeng Peng and Mengwei Li
Link: https://www.mdpi.com/2072-666X/14/7/1301

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