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Micromachines
Volume 14
Issue 1
10.3390/mi14010067
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Article

Design and Optimization of an S-Band MEMS Bandpass Filter Based on Aggressive Space Mapping

by
Qiannan Wu
1,2,3,4,5,*,
Xudong Gao
2,3,4,5,6,
Zemin Shi
2,3,4,5,6,
Jing Li
2,3,4,5,6 and
Mengwei Li
2,3,4,5,6,*
1
School of Semiconductors and Physics, North University of China, Taiyuan 030051, China
2
Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China
3
Center for Microsystem Integration, North University of China, Taiyuan 030051, China
4
School of Instrument and Intelligent Future Technology, North University of China, Taiyuan 030051, China
5
Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China
6
School of Instrument and Electronics, North University of China, Taiyuan 030051, China
*
Authors to whom correspondence should be addressed.
Micromachines 2023, 14(1), 67; https://doi.org/10.3390/mi14010067
Submission received: 1 December 2022 / Revised: 23 December 2022 / Accepted: 25 December 2022 / Published: 27 December 2022
(This article belongs to the Special Issue Design Trends in RF/Microwave Filtering and Memristive Devices)
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Abstract

Aggressive space mapping (ASM) is a common filter simulation and debugging method. It plays an important role in the field of microwave device design. This paper introduces ASM and presents the design and fabrication of a compact fifth-order microstrip interdigital filter with a center frequency of 2.5 GHz and a relative bandwidth of 10% using ASM. The filter used a double-layer silicon substrate structure and stepped impedance resonators (SIRs) and was optimized by ASM. After five iterations, the filter achieved the design specification, which greatly improves the efficiency of the filter design compared with the traditional method. It was fabricated on high-resistance silicon wafers by micro-electro-mechanical systems (MEMSs) technology, and the final size of the chip is 9.5 mm × 7.6 mm × 0.8 mm. The measurement results show that the characteristics of the filter are similar to the simulation results, which also shows the efficiency and precision of the ASM algorithm.
Keywords: ASM; interdigital filter; double-layer; SIR; MEMS ASM; interdigital filter; double-layer; SIR; MEMS

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MDPI and ACS Style

Wu, Q.; Gao, X.; Shi, Z.; Li, J.; Li, M. Design and Optimization of an S-Band MEMS Bandpass Filter Based on Aggressive Space Mapping. Micromachines 2023, 14, 67. https://doi.org/10.3390/mi14010067

AMA Style

Wu Q, Gao X, Shi Z, Li J, Li M. Design and Optimization of an S-Band MEMS Bandpass Filter Based on Aggressive Space Mapping. Micromachines. 2023; 14(1):67. https://doi.org/10.3390/mi14010067

Chicago/Turabian Style

Wu, Qiannan, Xudong Gao, Zemin Shi, Jing Li, and Mengwei Li. 2023. "Design and Optimization of an S-Band MEMS Bandpass Filter Based on Aggressive Space Mapping" Micromachines 14, no. 1: 67. https://doi.org/10.3390/mi14010067

APA Style

Wu, Q., Gao, X., Shi, Z., Li, J., & Li, M. (2023). Design and Optimization of an S-Band MEMS Bandpass Filter Based on Aggressive Space Mapping. Micromachines, 14(1), 67. https://doi.org/10.3390/mi14010067

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