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Volume 13
Issue 8
10.3390/mi13081183
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Article

Focusing Characteristics and Widefield Imaging Performance of the Silicon Metalens in the Visible Range

by
Miao Zhao
1,2,
Binbin Yu
3,4,*,
Jing Du
5 and
Jing Wen
6,*
1
Laboratory of Micro-Nano Optoelectronic Materials and Devices, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3
Wenzhou Institute, University of Chinese Academy of Sciences, Wenzhou 325000, China
4
Oujiang Laboratory, Wenzhou 325000, China
5
The Mars Laboratory, Huitong School & Studios, Shenzhen 518052, China
6
Engineering Research Center of Optical Instrument and Systems, Ministry of Education and Shanghai Key Lab of Modern Optical System, University of Shanghai for Science and Technology, Shanghai 200093, China
*
Authors to whom correspondence should be addressed.
Micromachines 2022, 13(8), 1183; https://doi.org/10.3390/mi13081183
Submission received: 30 June 2022 / Revised: 24 July 2022 / Accepted: 25 July 2022 / Published: 27 July 2022
(This article belongs to the Section A: Physics)
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Abstract

Conventional optical high numerical aperture lenses are essential for high-resolution imaging, but bulky and expensive. In comparison, metalens-based optical components are the subjects of intensive investigation for their flexible manipulation of light. Methods of detecting and characterizing focal spots and scanning imaging produced by metalenses are well established. However, widefield imaging by metalenses is experimentally challenging. This study demonstrates the design and realization of silicon-based metalenses with numerical apertures of 0.447 and 0.204 in the broadband spectrum of 580–780 nm for microscopic widefield imaging. The optimized aspect ratio of the single nanorod is 5.1:1, which reduces the fabrication difficulty compared to other, more complicated designs and fabrication. Furthermore, we successfully demonstrate widefield imaging by the designed metalens and compare the simulated and the experimentally extracted modulation transfer function curves of the metalens.
Keywords: metalens; imaging performance; focusing characteristics; silicon metalens metalens; imaging performance; focusing characteristics; silicon metalens

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MDPI and ACS Style

Zhao, M.; Yu, B.; Du, J.; Wen, J. Focusing Characteristics and Widefield Imaging Performance of the Silicon Metalens in the Visible Range. Micromachines 2022, 13, 1183. https://doi.org/10.3390/mi13081183

AMA Style

Zhao M, Yu B, Du J, Wen J. Focusing Characteristics and Widefield Imaging Performance of the Silicon Metalens in the Visible Range. Micromachines. 2022; 13(8):1183. https://doi.org/10.3390/mi13081183

Chicago/Turabian Style

Zhao, Miao, Binbin Yu, Jing Du, and Jing Wen. 2022. "Focusing Characteristics and Widefield Imaging Performance of the Silicon Metalens in the Visible Range" Micromachines 13, no. 8: 1183. https://doi.org/10.3390/mi13081183

APA Style

Zhao, M., Yu, B., Du, J., & Wen, J. (2022). Focusing Characteristics and Widefield Imaging Performance of the Silicon Metalens in the Visible Range. Micromachines, 13(8), 1183. https://doi.org/10.3390/mi13081183

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