Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching

Zhang, Lansheng; Chu, Xiaoyang; Tian, Feng; Xu, Yang; Hu, Huan

doi:10.3390/mi13071077

Open AccessArticle

Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching

by

Lansheng Zhang

¹

,

Xiaoyang Chu

¹,

Feng Tian

^1,2,

Yang Xu

² and

Huan Hu

^1,3,*

¹

ZJU-UIUC Institute, International Campus, Zhejiang University, Haining 314400, China

²

School of Micro-Nano Electronics, Zhejiang University, Hangzhou 310000, China

³

State Key Laboratory of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310000, China

^*

Author to whom correspondence should be addressed.

Micromachines 2022, 13(7), 1077; https://doi.org/10.3390/mi13071077

Submission received: 19 June 2022 / Revised: 5 July 2022 / Accepted: 5 July 2022 / Published: 7 July 2022

(This article belongs to the Special Issue Micro- and Nano-Fabrication by Metal Assisted Chemical Etching, Volume II)

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Abstract

We report a cost-effective and scalable methodology for producing a hierarchical micro-/nanostructured silicon surface solely by metal-assisted chemical etching. It involves two major processing steps of fabricating micropillars and nanowires separately. The process of producing micro-scale structures by masked metal-assisted chemical etching was optimized. Silicon nanowires were created on the micropillar’s surface via maskless metal-assisted chemical etching. The hierarchical micro-/nanostructured surface exhibits superhydrophobic properties with a high contact angle of ~156° and a low sliding angle of <2.5° for deionized water. Furthermore, due to the existence of microscale and nanoscale air trapped at the liquid/solid interface, it exhibits a long ice delay time of 2876 s at −5 °C, more than 5 times longer than that of smooth surfaces. Compared to conventional dry etching methods, the metal-assisted chemical etching approach excludes vacuum environments and high-temperature processes and can be applied for applications requiring hierarchical micro-/nanostructured surfaces or structures.

Keywords: hierarchical micro-/nanostructures; superhydrophobic; anti-icing; metal-assisted chemical etching

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MDPI and ACS Style

Zhang, L.; Chu, X.; Tian, F.; Xu, Y.; Hu, H. Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching. Micromachines 2022, 13, 1077. https://doi.org/10.3390/mi13071077

AMA Style

Zhang L, Chu X, Tian F, Xu Y, Hu H. Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching. Micromachines. 2022; 13(7):1077. https://doi.org/10.3390/mi13071077

Chicago/Turabian Style

Zhang, Lansheng, Xiaoyang Chu, Feng Tian, Yang Xu, and Huan Hu. 2022. "Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching" Micromachines 13, no. 7: 1077. https://doi.org/10.3390/mi13071077

APA Style

Zhang, L., Chu, X., Tian, F., Xu, Y., & Hu, H. (2022). Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching. Micromachines, 13(7), 1077. https://doi.org/10.3390/mi13071077

Note that from the first issue of 2016, this journal uses article numbers instead of page numbers. See further details here.

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Bio-Inspired Hierarchical Micro-/Nanostructures for Anti-Icing Solely Fabricated by Metal-Assisted Chemical Etching

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