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Journal: Micromachines, 2022
Volume: 13
Number: 228

Article: Scanning Probe Lithography: State-of-the-Art and Future Perspectives
Authors: by Pengfei Fan, Jian Gao, Hui Mao, Yanquan Geng, Yongda Yan, Yuzhang Wang, Saurav Goel and Xichun Luo
Link: https://www.mdpi.com/2072-666X/13/2/228

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