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Journal: Micromachines, 2022
Volume: 13
Number: 2139

Article: The Design and Fabrication of a MEMS Electronic Calibration Chip
Authors: by Qiannan Wu, Yu Chen, Qianlong Cao, Jingchao Zhao, Shanshan Wang, Junqiang Wang and Mengwei Li
Link: https://www.mdpi.com/2072-666X/13/12/2139

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