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Journal: Micromachines, 2022
Volume: 13
Number: 2090
2090
Article: Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure
Authors: by Xiaorui Lu, Jiahui Liu, Guowei Han, Chaowei Si, Yongmei Zhao, Zhongxuan Hou, Yongkang Zhang, Jin Ning and Fuhua Yang
Link: https://www.mdpi.com/2072-666X/13/12/2090

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