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Journal: Micromachines, 2022
Volume: 13
Number: 2008
Article:
A Novel Monopolar Cross-Scale Nanopositioning Stage Based on Dual Piezoelectric Stick-Slip Driving Principle
Authors:
by
Junhui Zhu, Siyuan Meng, Yong Wang, Ming Pang, Zhiping Hu and Changhai Ru
Link:
https://www.mdpi.com/2072-666X/13/11/2008
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