Six-Degree-of-Freedom Posture Measurement Technologies Using Position Sensitive Detectors (PSDs): State of the Art

Meng, Xiangxu; Sun, Siwei; Yan, Xuetao; Liu, Fengman; Cao, Liqiang; Wang, Qidong; Sun, Yu

doi:10.3390/mi13111903

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Six-Degree-of-Freedom Posture Measurement Technologies Using Position Sensitive Detectors (PSDs): State of the Art

by

Xiangxu Meng

^1,2,

Siwei Sun

^1,*

,

Xuetao Yan

^1,2,

Fengman Liu

^1,*,

Liqiang Cao

¹,

Qidong Wang

¹

and

Yu Sun

¹

System Packaging and Integration Research Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

²

School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China

^*

Authors to whom correspondence should be addressed.

Micromachines 2022, 13(11), 1903; https://doi.org/10.3390/mi13111903

Submission received: 20 September 2022 / Revised: 31 October 2022 / Accepted: 1 November 2022 / Published: 3 November 2022

(This article belongs to the Special Issue Optical Sensing and Devices)

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Abstract

Six degree-of-freedom (6-DOF) posture measurement is an important academic research topic which has been broadly applied in many fields. As a high-speed photoelectronic sensor with ultra-high resolution and precision, position sensitive detector (PSD) has shown to be one of the most competitive candidates in 6-DOF measurement. This review presents the research progress of PSD-based 6-DOF posture measurement systems in the field of large-scale equipment assembly, ultra-precision manufacturing and other emerging areas. A total of six methods for implementing 6-DOF measurement are summarized and their advantages and limitations are discussed. Meanwhile, the paper illustrates challenges, potential solutions and future development trends.

Keywords: 6-DOF posture measurement; position sensitive detector; large-scale equipment assembly; ultra-precision manufacturing

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MDPI and ACS Style

Meng, X.; Sun, S.; Yan, X.; Liu, F.; Cao, L.; Wang, Q.; Sun, Y. Six-Degree-of-Freedom Posture Measurement Technologies Using Position Sensitive Detectors (PSDs): State of the Art. Micromachines 2022, 13, 1903. https://doi.org/10.3390/mi13111903

AMA Style

Meng X, Sun S, Yan X, Liu F, Cao L, Wang Q, Sun Y. Six-Degree-of-Freedom Posture Measurement Technologies Using Position Sensitive Detectors (PSDs): State of the Art. Micromachines. 2022; 13(11):1903. https://doi.org/10.3390/mi13111903

Chicago/Turabian Style

Meng, Xiangxu, Siwei Sun, Xuetao Yan, Fengman Liu, Liqiang Cao, Qidong Wang, and Yu Sun. 2022. "Six-Degree-of-Freedom Posture Measurement Technologies Using Position Sensitive Detectors (PSDs): State of the Art" Micromachines 13, no. 11: 1903. https://doi.org/10.3390/mi13111903

APA Style

Meng, X., Sun, S., Yan, X., Liu, F., Cao, L., Wang, Q., & Sun, Y. (2022). Six-Degree-of-Freedom Posture Measurement Technologies Using Position Sensitive Detectors (PSDs): State of the Art. Micromachines, 13(11), 1903. https://doi.org/10.3390/mi13111903

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Six-Degree-of-Freedom Posture Measurement Technologies Using Position Sensitive Detectors (PSDs): State of the Art

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