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Journal: Micromachines, 2022
Volume: 13
Number: 1686
Article:
An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring
Authors:
by
Lan Zhang, Jian Lu, Hideki Takagi, Sohei Matsumoto and Eiji Higurashi
Link:
https://www.mdpi.com/2072-666X/13/10/1686
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