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Journal: Micromachines, 2022
Volume: 13
Number: 1628
Article:
Structural Optimization and MEMS Implementation of the NV Center Phonon Piezoelectric Device
Authors:
by
Xiang Shen, Liye Zhao and Fei Ge
Link:
https://www.mdpi.com/2072-666X/13/10/1628
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