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Zhao J, Zhu Z, Sun H, Lv S, Wang X, Song C. A MEMS Fabrication Process with Thermal-Oxide Releasing Barriers and Polysilicon Sacrificial Layers for AlN Lamb-Wave Resonators to Achieve f_s·Q_m > 3.42 × 10¹². Micromachines. 2021; 12(8):892. https://doi.org/10.3390/mi12080892

Zhao, Jicong, Zheng Zhu, Haiyan Sun, Shitao Lv, Xingyu Wang, and Chenguang Song. 2021. "A MEMS Fabrication Process with Thermal-Oxide Releasing Barriers and Polysilicon Sacrificial Layers for AlN Lamb-Wave Resonators to Achieve f_s·Q_m > 3.42 × 10¹²" Micromachines 12, no. 8: 892. https://doi.org/10.3390/mi12080892

Zhao, J., Zhu, Z., Sun, H., Lv, S., Wang, X., & Song, C. (2021). A MEMS Fabrication Process with Thermal-Oxide Releasing Barriers and Polysilicon Sacrificial Layers for AlN Lamb-Wave Resonators to Achieve f_s·Q_m > 3.42 × 10¹². Micromachines, 12(8), 892. https://doi.org/10.3390/mi12080892